NanoGetters Expands Its Manufacturing Infrastructure For High-Volume Production

YPSILANTI, MI -- (MARKET WIRE) -- Sep 19, 2006 -- Integrated Sensing Systems, Inc. (ISSYS) and its subsidiary NanoGetters® announced that it has successfully expanded its manufacturing infrastructure for high-volume production. This expansion supplements the other wafer fabrication and deposition equipment already in use by the company in its class 100 cleanroom. This high-volume infrastructure can handle up to 100,000 wafers (4, 6 and 8 inches in diameter) per year.

The NanoGetter® technology offers wafer-level, high-vacuum, packaging for a variety of MEMS products. Getters are reactive materials used to improve vacuum quality by reducing residual gas molecules in devices such as displays, gyroscopes, infrared sensors, accelerometers, RF-MEMS used in cell phones and pressure sensors. Long-term and stable vacuum levels less than 1 milli-Torr have been produced by NanoGetter® products. This patent-protected technology can also be used in gas purification and for improving inert gas packaging.

Dr. Douglas R. Sparks, President of NanoGetters® and ISSYS Executive Vice President, stated, "It has been exciting to see NanoGetters® and ISSYS grow in the past few years. The need for expansion was two folded; first, many of our customers are getting ready for high-volume production and secondly, ISSYS is preparing for high-volume production (2007) of sensors for Direct Methanol Fuel Cell (DMFC) products, as well as disposable medical products for drug delivery and detection of drug delivery errors."

Company Background:

NanoGetters® is a wholly owned subsidiary (established in 2003) of ISSYS dedicated to commercializing new reactive materials and vacuum packaging techniques. ISSYS is a leader in advanced micromachining technologies for medical devices, microfluidic and scientific analytical sensing applications used in the development of drug infusion pumps and wireless, implantable sensing systems. Founded in 1995 by world renowned leaders in MEMS technology, ISSYS operates an "everything under one roof" multi-million-dollar, state-of-the-art Bio-MEMS fabrication facility located near Ann Arbor, Michigan. For more company, product and service information, please visit and

Doug Sparks
Integrated Sensing Systems, Inc. / NanoGetters
391 Airport Industrial Dr.
Ypsilanti, MI 48198
(734) 547-9896 ext. 119
Fax (734) 547-9964

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