The 200mm system for MEMS manufacturing incorporates Akrion's latest innovations for the GAMA Series platform, including the new integrated Omega Carrier and poly-cassette stockers. These enhancements are the latest in a long list of additions and improvements Akrion has made to the robust, mature GAMA Series of batch-immersion wet stations. Today, hundreds of GAMA systems run various etching, stripping and cleaning processes in fabs worldwide.
James S. Molinaro, Akrion president and CEO, commented, "Our continuous improvement philosophy has allowed an exceptionally long life for our GAMA platform. The GAMA systems we ship today benefit from everything we have learned from our vast installation base's many years of service to customers."
Akrion is a leading provider of wet cleaning systems for the semiconductor industry. The company designs, manufactures, installs and services advanced batch-immersion and single-wafer wet cleaning equipment used in the production of a diverse range of semiconductor and related devices, including integrated circuits, MEMS and photomasks. Headquartered in Allentown, Pa., Akrion's Allentown production facility is ISO 9001:2000 and ISO 14001:1996 certified. The company Web site is located at http://www.akrion.com.
Web site: http://www.akrion.com/