Mattson Technology Ships paradigmE Etch System to Leading Semiconductor Manufacturer's Logic Fab for Production of Advanced Devices

FREMONT, CA -- (MARKET WIRE) -- Oct 20, 2010 -- Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has shipped the paradigmE® etch system to a leading semiconductor manufacturer. The qualification system will be used in back-end-of-line (BEOL) etch applications for the production and development of advanced logic devices. Production revenues are expected to begin in the second half of 2011.

"The paradigmE is extending its success at this long-time customer's memory fabs to its new logic facility," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group. "The system's wide process window enables a range of advanced etch applications at extended technology nodes, delivering excellent processing performance and high throughput at low cost-of-ownership."

George continued, "The paradigmE is now established at foundry, memory, and logic fabs, and the growing acceptance of this new system will help us further expand into the growing etch market and double the company's total available served market. We look forward to supporting our customers by delivering high-productivity, technologically advanced, and cost-effective etch solutions that address their stringent requirements for manufacturing of high-performance, next-generation IC's."

About Mattson Technology, Inc.
Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON/(510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995:
This news release contains forward-looking statements. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. Such risks and uncertainties include, but are not limited to: end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10 K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact 
Lauren Vu 
Mattson Technology, Inc. 
tel +1-510-492-6250 
fax +1-510-492-5930 

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Investor Contact 
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Guerrant Associates
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